Plasma Chemistry I

Plasma Chemistry I

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Elementary plasma reactions of environmental interest
Plasma-materials interactions and impurity control in magnetically confined thermonuclear fusion machines
Preparation of optical waveguides with the aid of plasma-activated chemical vapour deposition at low pressures.

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ISBN 978-3-662-15976-7
Media type Book
Edition number Softcover reprint of the original 1st ed. 1980
Copyright year 2014
Publisher Springer, Berlin
Length V, 146 pages
Illustrations V, 146 p.
Language English