Sputtering by Particle Bombardment I
Physical Sputtering of Single-Element Solids
Sputtering by Particle Bombardment I
Physical Sputtering of Single-Element Solids
and overview
Sputtering by ion bombardment theoretical conceptsTheoretical aspects of monocrystal sputtering
Sputtering yield measurements
Sputtering yields of single crystalline targets.
Behrisch, R.
| ISBN | 978-3-662-30888-2 |
|---|---|
| Article number | 9783662308882 |
| Media type | Book |
| Edition number | Softcover reprint of the original 1st ed. 1981 |
| Copyright year | 2014 |
| Publisher | Springer, Berlin |
| Length | XI, 284 pages |
| Illustrations | XI, 284 p. 19 illus. |
| Language | English |
