Sputtering by Particle Bombardment II
Sputtering of Alloys and Compounds, Electron and Neutron Sputtering, Surface Topography
Sputtering by Particle Bombardment II
Sputtering of Alloys and Compounds, Electron and Neutron Sputtering, Surface Topography
and overview
Sputtering of multicomponent materialsChemical sputtering
Sputtering by electrons and photons
Sputtering of solids with neutrons
Heavy ion sputtering induced surface topography development
Development of surface topography due to gas ion implantation.
Behrisch, R.
| ISBN | 978-3-662-31169-1 |
|---|---|
| Article number | 9783662311691 |
| Media type | Book |
| Edition number | Softcover reprint of the original 1st ed. 1983 |
| Copyright year | 2014 |
| Publisher | Springer, Berlin |
| Length | XIII, 394 pages |
| Illustrations | XIII, 394 p. |
| Language | English |
